Nanogap device with capped nanowire structures

ABSTRACT

An anti-retraction capping material is formed on a surface of a nanowire that is located upon a dielectric membrane. A gap is then formed into the anti-retraction capping material and nanowire forming first and second capped nanowire structures of a nanodevice. The nanodevice can be used for recognition tunneling measurements including, for example DNA sequencing. The anti-retraction capping material serves as a mobility barrier to pin, i.e., confine, a nanowire portion of each of the first and second capped nanowire structures in place, allowing long-term structural stability. In some embodiments, interelectrode leakage through solution during recognition tunneling measurements can be minimized.

This application is a divisional of U.S. Ser. No. 14/041,922, filed Sep.30, 2013, which is a continuation-in-part application of U.S. Ser. No.13/945,295, filed Jul. 18, 2013, which is a continuation application ofU.S. Ser. No. 13/921,383, filed Jun. 19, 2013, the entire contents ofall applications are incorporated herein by reference.

BACKGROUND

The present application relates to a nanodevice, and more particularly,to a sub-3 nm nanogap device containing capped nanowire structureslocated on a surface of a dielectric membrane.

Nanopore sequencing is a method for determining the order in whichnucleotides occur on a strand of deoxyribonucleic acid (DNA). A nanopore(also referred to as pore, nanochannel, hole, etc.) can be a small holein the order of several nanometers in internal diameter. The theorybehind nanopore sequencing is about what occurs when the nanopore issubmerged in a conducting fluid and an electric potential (voltage) isapplied across the nanopore. Under these conditions, a slight electriccurrent due to conduction of ions through the nanopore can be measured,and the amount of current is very sensitive to the size and shape of thenanopore. If single bases or strands of DNA pass (or part of the DNAmolecule passes) through the nanopore, this can create a change in themagnitude of the current through the nanopore. Other electrical oroptical sensors can also be positioned around the nanopore so that DNAbases can be differentiated while the DNA passes through the nanopore.

The DNA can be driven through the nanopore by using various methods, sothat the DNA might eventually pass through the nanopore. The scale ofthe nanopore can have the effect that the DNA may be forced through thehole as a long string, one base at a time, like a thread through the eyeof a needle. Recently, there has been growing interest in applyingnanopores as sensors for rapid analysis of biomolecules such asdeoxyribonucleic acid (DNA), ribonucleic acid (RNA), protein, etc.Special emphasis has been given to applications of nanopores for DNAsequencing, as this technology holds the promise to reduce the cost ofsequencing below $1000/human genome.

SUMMARY

An anti-retraction capping material is formed on a surface of a nanowirethat is located upon a dielectric membrane. A gap is then formed intothe anti-retraction capping material and nanowire forming first andsecond capped nanowire structures of a nanodevice. The nanodevice can beused for recognition tunneling measurements including, for example DNAsequencing. The anti-retraction capping material serves as a mobilitybarrier to pin, i.e., confine, a nanowire portion of each of the firstand second capped nanowire structures in place, allowing long-termstructural stability. In some embodiments, interelectrode leakagethrough solution during recognition tunneling measurements can beminimized.

In one aspect of the present application, a method of forming a nanogapdevice is provided. In one embodiment of the present application, themethod includes providing a dielectric membrane on a front-side surfaceof a semiconductor substrate. A nanowire is then formed on a surface ofthe dielectric membrane. An anti-retraction capping material isdeposited on an upper surface of the nanowire. Next, the anti-retractioncapping material and the nanowire are cut to provide a first cappednanowire structure and a second capped nanowire structure. The firstcapped nanowire structure and the second capped nanowire structure areseparated by a nanogap of less than 3 nanometers.

In another aspect of the present application, a nanogap device isprovided. In one embodiment of the present application, the nanogapdevice includes a dielectric membrane located on a front-side surface ofa semiconductor substrate. A first capped nanowire structure is locatedon a first portion of the dielectric membrane, and a second cappednanowire structure is located on a second portion of the dielectricmembrane. In accordance with the present application, the first cappednanowire structure and the second capped nanowire structure areseparated by a nanogap of less than 3 nanometers.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross sectional view of a first exemplary structureincluding, from bottom to top, a semiconductor substrate and adielectric membrane in accordance with an embodiment of the presentapplication.

FIG. 2 is a cross sectional view of the first exemplary structure ofFIG. 1 after forming a protective layer on the dielectric membrane.

FIG. 3 is a cross sectional view of the first exemplary structure ofFIG. 2 after rotating the structure 180° and forming a hard mask on asurface of the semiconductor substrate opposite the surface containingthe dielectric membrane.

FIG. 4 is a cross sectional view of the first exemplary structure ofFIG. 3 after patterning the hard mask.

FIG. 5 is a cross sectional view of the first exemplary structure ofFIG. 4 after providing an opening within the semiconductor substrateusing remaining portions of the hard mask as an etch mask.

FIG. 6 is a cross sectional view of the first exemplary structure ofFIG. 5 after removing the remaining portions of the hard mask, rotatingthe structure 180° and removing the protective layer.

FIG. 7 is a cross sectional view of the first exemplary structure ofFIG. 6 after forming a nanowire.

FIG. 8 is a cross sectional view of the first exemplary structure ofFIG. 7 after forming metal pads on portions of the nanowire.

FIG. 9 is a cross sectional view of the first exemplary structure ofFIG. 8 after coating the nanowire and metal pads with an anti-retractioncapping material.

FIG. 10 is a cross sectional view of the first exemplary structure ofFIG. 9 after cutting the anti-retraction capping material and thenanowire to provide a first capped nanowire structure and a secondcapped nanowire structure, wherein the first capped nanowire structureand the second capped nanowire structure are separated by a nanogap ofless than 3 nanometers.

FIG. 11 is a cross sectional view of the first exemplary structure ofFIG. 10 after forming a first linker molecule on an exposed edge of afirst nanowire portion of the first capped nanowire structure and asecond linker molecule on an exposed edge of a second nanowire portionof the second capped nanowire structure.

FIG. 12 illustrates a sequencing system utilizing the nanodeviceaccording to an embodiment of the present application.

FIG. 13 is a plot of nanogap size (nm) vs. time in air (hours) for ananodevice including a capped nanowire structure (in accordance with thepresent application) and for a nanodevice including a non-cappednanowire structure (not in accordance with the present application).

DETAILED DESCRIPTION

The present application will now be described in greater detail byreferring to the following discussion and drawings that accompany thepresent application. It is noted that the drawings of the presentapplication are provided for illustrative purposes only and, as such,the drawings are not drawn to scale. It is also noted that like andcorresponding elements are referred to by like reference numerals.

In the following description, numerous specific details are set forth,such as particular structures, components, materials, dimensions,processing steps and techniques, in order to provide an understanding ofthe various embodiments of the present application. However, it will beappreciated by one of ordinary skill in the art that the variousembodiments of the present application may be practiced without thesespecific details. In other instances, well-known structures orprocessing steps have not been described in detail in order to avoidobscuring the present application.

The ability to rapidly sequence individual strands of DNA would enable abroad range of applications including, for example, discovering andunderstanding protein structures or detecting predispositions todiseases such as cancer. Single-based tunneling recognition is oneapproach that can be used to enable high-through-put, low-cost DNAsequencing because it reduces the amount of preparation that a targetDNA requires to ready it from sequencing, i.e., copying is notnecessary. While single-base recognition has been demonstrated using ascanning tunneling microscope (STM) approach, the failure to reproducethis capability on a technologically relevant platform has stemmed, inlarge part, from fabrication challenges that appear in structures withdimensions in the few nanometer range. Specifically, DNA sequencing bytunneling recognition on a manufacturable platform requires that thesignature tunneling current from each individual base be read by atunneling gap electrode which must be less than 3 nm wide and able tomaintain a fixed gap width.

As an electrode material, palladium and gold are considered to be idealcandidates for DNA sensing because such conductive metals are excellentlinkers for chemicals that are used to functionalize the electrodes,which are needed to ready the electrodes for DNA base differentiation;however, nanoscale surface mobility represents a major concern for thesematerials. The extraordinary high surface mobility of gold make it lessattractive than palladium for maintaining a fixed-gap width. Thoughpalladium fairs a bit better in this respect, it has been recentlydiscovered that a 3 nm gap cut in palladium nanowires results inretraction or widening of the gap by 0.7 to 2.5 nm after 1 day in air,rendering the gap size too large for the purposes of DNA sequencing.This stability issue is a major problem from a manufacturing perspectiveas well, wherein commercialization may not be possible due to yield andinstability issues. The present application provides a method andstructure that address the above stability issue.

Referring first to FIG. 1, there is illustrated a first exemplarystructure including, from bottom to top, a semiconductor substrate 10and a dielectric membrane 12 in accordance with an embodiment of thepresent application. The dielectric membrane 12 is formed as acontiguous dielectric layer on a front-side surface of the semiconductorsubstrate 10. Throughout the present application, the term “front-sidesurface of the semiconductor substrate” denotes a surface of thesemiconductor substrate 10 in which there is present an interface withthe dielectric membrane 12. Throughout the present application, the term“back-side surface of the semiconductor substrate” denotes a surface ofthe semiconductor substrate 10 that opposes the surface containing theinterface with the dielectric membrane 12.

The semiconductor substrate 10 that can be used in the presentapplication can be a bulk semiconductor substrate. The term “bulk”denotes that the entirety of the semiconductor substrate 10 is comprisedof a semiconductor material. Examples of semiconductor materials thatcan be employed as the semiconductor substrate include, but not limitedto, Si, Ge, SiGe, SiC, SiGeC, and III/V compound semiconductors such as,for example, InAs, GaAs, and InP. Multilayers of these semiconductormaterials can also be used as the semiconductor material of the bulksemiconductor. In one embodiment, the semiconductor substrate 10 can becomprised of a single crystalline semiconductor material, such as, forexample, single crystalline silicon. In other embodiments, thesemiconductor substrate 10 may comprise a polycrystalline or amorphoussemiconductor material. In yet other embodiments, semiconductorsubstrate 10 may comprise a multilayered stack of semiconductormaterials that are in epitaxial alignment with each other.

The semiconductor substrate 10 may have any crystal orientationincluding, for example, {100}, {110}, or {111}. Other crystallographicorientations besides those specifically mentioned can also be used inthe present application for the semiconductor substrate 10.

The semiconductor substrate 10 that is employed in the presentapplication may be an intrinsic semiconductor material. By “intrinsic”it is meant that the semiconductor substrate 10 has a dopantconcentration of less than 1×10¹⁵ atoms/cm³. In other embodiments, thesemiconductor substrate 10 may contain a p-type dopant or an n-typedopant. The dopant may be uniformly distributed throughout the entiretyof the semiconductor substrate 10 or the dopant may be present as agradient.

The dielectric membrane 12 that is present on the front-side surface ofthe semiconductor substrate 10 may be comprised of a semiconductoroxide, a semiconductor nitride and/or a semiconductor oxynitride. In oneembodiment of the present application, the dielectric membrane 12 may becomprised of silicon dioxide. In another embodiment of the presentapplication, the dielectric membrane 12 can be comprised of siliconnitride.

In one embodiment of the present application, the dielectric membrane 12can be formed on the front-side surface of the semiconductor substrate10 utilizing a deposition such as, for example, chemical vapordeposition, plasma enhanced chemical vapor deposition, or evaporation.In another embodiment of the present application, the dielectricmembrane 12 can be formed by a thermal growth process such as, forexample, thermal oxidation and/or thermal nitridation. The dielectricmembrane 12 that is formed at this point of the present application is acontiguous layer.

In one embodiment of the present application, the dielectric membrane 12that is formed may have a thickness from 5 nm to 200 nm. Otherthicknesses that are lesser than or greater than the aforementionedthickness range can also be used for the dielectric membrane 12 of thepresent application.

Referring now to FIG. 2, there is illustrated the first exemplarystructure of FIG. 1 after forming a protective layer 14 on thedielectric membrane 12. The protective layer 14 that can be used in thepresent application comprises a different material than that of thedielectric membrane 12. Moreover, the protective layer 14 that isemployed in the present application includes any material such as, forexample, a dielectric material and/or a diffusion barrier material,which can prevent any damage to the dielectric membrane 12 duringsubsequently performed processing steps that are performed on theback-side surface of the semiconductor substrate 10. Additionally, theprotective layer 14 should also have high etch selectivity compared withthe dielectric membrane 12 so that it can be removed when back-sideprocessing is complete without any thinning of the dielectric membrane12.

In one embodiment, the protective layer 14 may comprise an oxide, suchas, for example, silicon dioxide. In other embodiment, the protectivelayer 14 may include a multilayered stack of, from bottom to top, anoxide and a metal nitride. For example, the protective layer 14 mayinclude a multilayered stack of, from bottom to top, silicon dioxide andTiN.

The protective layer 14 can be formed on an exposed upper surface of thedielectric membrane 12 utilizing well known deposition processes. Forexample, a chemical vapor deposition process utilizingtetraethylorthosilate (TEOS) or other silicon dioxide forming gases canbe used. When a metal nitride is used as a portion of the protectivelayer 14, the metal nitride can be formed utilizing a deposition processsuch as, for example, chemical vapor deposition, plasma enhancedchemical vapor deposition, physical vapor deposition or chemicalsolution deposition.

In one embodiment of the present application, the protective layer 14that is formed may have a thickness from 500 nm to 700 nm. Otherthicknesses that are lesser than or greater than the aforementionedthickness range can also be used for the protective layer 14 of thepresent application.

Referring now to FIG. 3, there is illustrated the first exemplarystructure of FIG. 2 after rotating the structure 180° and forming a hardmask 16 on a surface (i.e., back-side surface) of the semiconductorsubstrate 10 opposite the surface containing the dielectric membrane 12.The hard mask 16 is a contiguous layer that covers an entirety of theback-side surface of the semiconductor substrate 10 that is opposite thesurface of the semiconductor substrate 10 including dielectric membrane12. The rotating of the structure shown in FIG. 2 by 180° may beperformed by hand or by any mechanical means including, for example, arobot arm.

The hard mask 16 that can be employed in this embodiment of the presentapplication may include a dielectric oxide, a dielectric nitride, adielectric oxynitride or any multilayered combination thereof. In someembodiments, the hard mask 16 may comprise a different dielectricmaterial than the dielectric membrane 12. In other embodiments, the hardmask 16 may comprise a same dielectric material as the dielectricmembrane 12. In one embodiment, the hard mask 16 is a dielectric oxidesuch as silicon dioxide, while in another embodiment the hard mask 16 isa dielectric nitride such as silicon nitride.

The hard mask 16 can be formed utilizing a deposition process including,for example, chemical vapor deposition (CVD), plasma enhanced chemicalvapor deposition (PECVD), chemical solution deposition, evaporation, orphysical vapor deposition (PVD). Alternatively, the hard mask 16 may beformed by one of thermal oxidation, and thermal nitridation. Thethickness of the hard mask 16 employed in the present application mayvary depending on the material of the hard mask 16 itself as well as thetechnique used in forming the same. Typically, and in one embodiment,the hard mask 16 has a thickness from 100 nm to 300 nm. Otherthicknesses that are greater than or lesser than the aforementionedthickness range can also be used for the thickness of the hard mask 16.

Referring now to FIG. 4, there is illustrated the first exemplarystructure of FIG. 3 after patterning the hard mask 16. The remainingportions of the hard mask 16 that are formed after patterning may bereferred to herein as a first hard mask portion 16L and a second hardmask portion 16R. The first hard mask portion 16L and the second hardmask portion 16R that are provided can be used in a subsequentprocessing step as an etch mask.

Patterning of the hard mask 16 can be performed by lithography andetching. Lithography can include forming a photoresist (not shown) onthe topmost surface of the hard mask 16, exposing the photoresist to adesired pattern, and then developing the exposed photoresist with aconventional resist developer to provide a patterned photoresist atopthe hard mask 16. An etch is then employed which transfers the patternfrom the patterned photoresist into the hard mask 16. In one embodiment,the etch used for pattern transfer may include a dry etch process suchas, for example, reactive ion etching, plasma etching, ion beam etchingor laser ablation. In another embodiment, the etch used for patterntransfer may include chemical etching process. In one example,tetramethylammonium hydroxide (TMAH) can be used as the chemicaletchant. After transferring the pattern into hard mask 16, the patternedphotoresist can be removed utilizing a resist stripping process such as,for example, ashing.

Referring now to FIG. 5, there is illustrated the first exemplarystructure of FIG. 4 after providing an opening 18 within thesemiconductor substrate 10 using the remaining portions of the hard mask16L, 16R as an etch mask. The opening 18 is formed inward from theback-side surface of semiconductor substrate 10 to the front-sidesurface of the semiconductor substrate 10. The remaining portions of thesemiconductor substrate 10 may be referred to herein as a firstsemiconductor material portion 10L and a second semiconductor materialportion 10R. The opening 18 that is provided exposes a surface of thedielectric membrane 12 that is opposite the surface of the dielectricmembrane 12 that includes the protective layer 14. Although thedrawings, and following description, illustrate the presence of a singleopening 18, a plurality of openings can be formed inward from theback-side surface of semiconductor substrate 10.

In some embodiments, the opening 18 that is formed into thesemiconductor substrate 10 may have sidewalls that are perpendicularlyoriented to the bottom surface of the dielectric membrane 12. In otherembodiments, the opening 18 that is formed into the semiconductorsubstrate 10 has tapered sidewalls. In some cases, the tapering of thesidewalls of the opening 18 may expand outwards from the bottom surfaceof the dielectric membrane 12 to the back-side surface of thesemiconductor substrate 10 such that a width of the opening 18 that isnearest to the bottommost surface of the dielectric membrane 12 is lessthan a width of the opening 18 that is nearest to the back-side surfaceof the semiconductor substrate 10. In some cases, the tapering of thesidewalls of the opening may contract outwards from the bottom surfaceof the dielectric membrane 12 to the back-side surface of thesemiconductor substrate 10 such that a width of the opening 18 the isnearest to the bottommost surface of the dielectric membrane 12 isgreater than a width of the opening 18 that is nearest to the back-sidesurface of the semiconductor substrate 10. Notwithstanding the type ofopening 18 formed, the opening 18 has a width that is greater than awidth of a nanogap to be subsequently formed in the dielectric membrane12.

The opening 18 that is formed into the semiconductor substrate 10 can beprovided utilizing an etching process that is selective for removingsemiconductor material as compared to remaining hard mask portions 16L,16R and dielectric membrane 12. The etch process may be an isotropicetch or an anisotropic etch. In some embodiments, a crystallographicetch can be used in providing the opening 18. By “crystallographic etch”it is meant an etching process, typically a wet etch, in which etchingoccurs preferentially along selected crystallographic planes in acrystalline solid. In one example and when silicon is used as thesemiconductor substrate 10, the opening 18 can be formed utilizingtetramethylammonium hydroxide (TMAH).

Referring now to FIG. 6, there is illustrated the first exemplarystructure of FIG. 5 after removing the remaining portions of the hardmask 16L, 16R, rotating the structure 180° and removing the protectivelayer 14. In some embodiments of the present application, the removal ofthe remaining portions of the hard mask 16L, 16R can be omitted and theremaining portions of the hard mask 16L, 16R can be left within thefinal nanodevice of the present application. The removal of theprotective layer 14 from the structure exposes the upper surface of thedielectric membrane 12.

In embodiments in which the remaining portions of the hard mask 16L, 16Rare removed, an etching process can be used to remove the remainingportions of the hard mask 16L, 16R from the structure. The rotating ofthe structure can be performed by hand or any mechanical meansincluding, for example, a robot arm. The protective layer 14 can beremoved by a planarization process such as, for example, chemicalmechanical planarization and/or grinding. Alternatively, an etchingprocess can be used to remove the protective layer 14.

Referring now to FIG. 7, there is illustrated the first exemplarystructure of FIG. 6 after forming a nanowire 20 on the exposed surfaceof the dielectric membrane 12. It is noted that the nanowire 20 does notnecessary span the entire length of the underlying dielectric membrane12. It is also noted that although a single nanowire 20 is described andillustrated, a plurality of nanowires 20 can be formed.

The nanowire 20 may include at least one transition metal from GroupVIB, VIII and IB of the Periodic Table of Elements. In one embodiment,the nanowire 20 is selected from the group consisting of palladium,platinum and/or gold. The nanowire 20 may include a single layeredstructure or it may include a multilayered structure including at leasttwo different metals stack one on top of the other.

The nanowire 20 can be formed be first forming a layer of nanowirematerial (not specifically shown) on an exposed surface of thedielectric membrane 12 utilizing a deposition process including, forexample, chemical vapor deposition, plasma chemical vapor deposition,atomic layer deposition, physical vapor deposition, sputtering, orplating. After deposition the layer of nanowire material, the nanowire20 can be formed by patterning the layer of nanowire material. In oneembodiment of the present application, the patterning of the layer ofnanowire material may include e-beam lithography and a lift-offtechnique. In another embodiment of the present application, thepatterning of the layer of nanowire material may include lithography andetching.

In one embodiment of the present application, the nanowire 20 that isformed may have a height from 2 nm to 20 nm. Other heights that arelesser than or greater than the aforementioned range can also be usedfor the nanowire 20 of the present application. The nanowire 20 can havea length from 20 nm to 1000 nm. The width of nanowire 20, as measuredfrom one sidewall surface of the nanowire 20 to an opposing sidewallsurface of the nanowire 20, can be from 2 nm to 50 nm.

Referring now to FIG. 8, there is illustrated the first exemplarystructure of FIG. 7 after forming metal pads 22L, 22R on portions of thenanowire 20. In one embodiment, the metal pads 22L, 22R can be comprisedof a same metal or metal alloy as the nanowire 20. In anotherembodiment, the metal pads 22L, 22R can be comprised of a differentmetal or metal alloy as nanowire 20. Notwithstanding which embodiment isemployed, the metal pads 22L, 22R can include at least one transitionmetal from Group VIB, VIII and IB of the Periodic Table of Elements. Inone embodiment, each metal pad 22L, 22R is selected from the groupconsisting of palladium, platinum and/or gold.

The metal pads 22L, 22R that are formed have a thickness that isgenerally greater than the thickness of the nanowire 20. The metal pads22L, 22R can be formed utilizing the same techniques as mentioned abovein forming the nanowire 20. That is, the metal pads 22L, 22R can beformed by depositing a blanket layer of a metal pad material. Theblanket layer of metal pad material is then patterned. In one embodimentof the present application, the patterning of the blanket layer of metalpad material may include e-beam lithography and a lift-off technique. Inanother embodiment of the present application, the patterning of theblanket layer of metal pad material may include lithography and etching.

Referring now to FIG. 9, there is illustrated the first exemplarystructure of FIG. 8 after coating the nanowire 20 and the metal pad 22L,22R with an anti-retraction capping material 24. The anti-retractioncapping material 24 is a contiguous layer that is formed on exposedsurfaces (sidewalls and upper surface) of the nanowire 20 and exposedsurfaces (sidewalls and upper surface) of each metal pad 22L, 22R. Theanti-retraction capping material 24 is used in the present applicationto prevent the retraction of subsequently formed nanowire portions ofthe nanodevice of the present application during their use. Theanti-retraction capping material 24 can also act as a mobility barrierto pin the nanowire portions (to be subsequently formed) in place,allowing long-term stability.

The anti-retraction capping material 24 that is used in the presentapplication has an adequate compressive stress and shares some covalentbonds with the nanowire 20 beneath it. By “adequate compressive stress”it is meant that a sufficient compressive stress is present tocounteract the natural tendency of the nanowire material retract after agap 26 has been formed. Covalent bonds between the nanowire 20 andanti-retraction capping material 24 are necessary for the cappingmaterial 24 to hold the cut nanowires 20L, 20R, to be subsequentlyformed in place. In some embodiments, the anti-retraction cappingmaterial 24 may be a dielectric material. In other embodiments, theanti-retraction capping material 24 may be composed of anon-electrically insulating material.

In one embodiment of the present application, aluminum oxide can be usedas the anti-retraction capping material 24. In another embodiment of thepresent application, titanium nitride can be used as the anti-retractioncapping material 24. In a further embodiment, silicon nitride can beused as the anti-retraction capping material 24. Other materials whichcan prevent diffusion of conductive atoms from the nanowire 20 can beused as the anti-retraction capping material. The anti-retractioncapping material 24 may be a single layered structure, or it can be amultilayered structure including at least two different anti-retractioncapping materials stacked one atop of the other. Hence, anti-retractioncapping material 24 may include a stack of, from bottom to top, a layerof silicon nitride and a layer of titanium nitride. In embodiments inwhich hard mask portions 16L, 16R are retained on the back-side surfaceof the semiconductor substrate 10, the anti-retraction capping material24 comprises a different material than that of the hard mask portions16L, 16R.

The anti-retraction capping material 24 can be formed by a depositionprocess such as, for example, sputtering or atomic layer deposition. Inone embodiment of the present application, the anti-retraction cappingmaterial 24 that is formed may have a thickness from 3 nm to 15 nm.Other thicknesses that are lesser than or greater than theaforementioned thickness range can also be used for the anti-retractioncapping material 24 of the present application.

Referring now to FIG. 10, there is illustrated the first exemplarystructure of FIG. 9 after cutting the anti-retraction capping material24 and the nanowire 20 to provide a first capped nanowire structure anda second capped nanowire structure, wherein the first capped nanowirestructure and the second capped nanowire structure are separated by ananogap 26 of less than 3 nanometers. In one example, the nanogap 26between the first capped nanowire structure and the second cappednanowire structure is from 0.2 nm to 2 nm. The nanogap 26 of the presentapplication is formed through both the anti-retraction capping material24 and the nanowire 20.

In accordance with the present application, the first capped nanowirestructure includes a first nanowire portion 20L and a firstanti-retraction capping material portion 24L, and the second cappednanowire structure includes a second nanowire portion 20R and a secondanti-retraction capping material portion 24R. The first and secondnanowire portions 20L, 20R are used as the electrodes of the nanodeviceof the present application.

The first capped nanowire structure (20L, 24L) and the second cappednanowire structure (20R, 24R) can be formed by cutting theanti-retraction capping material 24 and the nanowire 20.

In one embodiment of the present application, the cutting of theanti-retraction capping material 24 and the nanowire 20 may include ahelium ion beam cutting process in which a helium ion microscope can beused. In such a cutting process, helium ions are irradiated from thehelium ion microscope and are used in the present application in formingthe nanogap 26. Any conventional helium ion microscope including, forexample, ORION™ Helium Ion Microscope from Carl Zeiss SMT or theMultiple Ion Beam Microscopes from Carl Zeiss SMT can be used in thepresent application.

Some exemplary helium ion microscope conditions that can be used forcutting the anti-retraction capping material 24 and the nanowire 20 andthus forming nanogap 26 are now described. Notably, and in someembodiments, a voltage from 10 kilovolts to 30 kilovolts, a beam currentof from 25 pA (picoamperes) to 1500 pA, a beam spot size of from 3.4 Åto 5 Å, a step size of from 5 Å to 50 Å, a working distance of from 5millimeters to 10 millimeters, an aperture opening from 7.5 micrometersto 30 micrometers, and a exposure time from 0.5 μs/pixel to 2.0 μs/pixelcan be used in the present application in providing the nanogap 26through both the anti-retraction capping material 24 and the nanowire20.

In another embodiment of the present application, the cutting of theanti-retraction capping material 24 and the nanowire 20 may include theuse of a focused transmission electron microscope (TEM) beam cuttingprocess. When such a process is used, any conventional focusedtransmission electron microscope (TEM) beam cutting apparatus can beused. The conditions that can be used when a focused transmissionelectron microscope (TEM) beam cutting apparatus is employed in formingthe nanogap 26 vary and can be optimized to provide a nanogap having adimension of 3 nm or less.

In yet a further embodiment, the cutting of the anti-retraction cappingmaterial 24 and the nanowire 20 may include the use of a combination ofa helium ion beam cutting and focused transmission electron microscope(TEM) beam cutting.

Referring now to FIG. 11, there is illustrated the first exemplarystructure of FIG. 10 after forming a first linker molecule L1 on anexposed edge of the first nanowire portion 20L of the first cappednanowire structure and a second linker molecule L2 on an exposed edge ofthe second nanowire portion 20R of the second capped nanowire structure.

The term “linker molecule” as used in the present application denotes athiolated chemical compound. The first and second linker molecules L1,L2 that can be employed in the present application include, for example,imidazole or benzamide. The first and second linker molecules L1, L2 canbe provided to the exposed edge of the first nanowire portion 20L of thefirst capped nanowire structure and the exposed edge of the secondnanowire portion 20R of the second capped nanowire structure by covalentbinding.

FIGS. 10 and 11 illustrate a nanogap device in accordance with thepresent application. The nanogap device includes a dielectric membrane12 located on a front-side surface of a semiconductor substrate 10L,10R. A first capped nanowire structure (20L and 24L) is located on afirst portion of the dielectric membrane 12, and a second cappednanowire structure (20R and 24R) is located on a second portion of thedielectric membrane. In accordance with the present application, thefirst capped nanowire structure (20L and 24L) and the second cappednanowire structure 20R and 24R) are separated by a nanogap 26 of lessthan 3 nanometers.

Referring now to FIG. 12, there is illustrated a system 50 forsequencing using the nanodevice illustrated in FIG. 11. As mentionedabove, the nanodevice includes a dielectric membrane 12 located on afront-side surface of a semiconductor substrate 10L, 10R. A first cappednanowire structure (20L and 24L) is located on a first portion of thedielectric membrane 12, and a second capped nanowire structure (20R and24R) is located on a second portion of the dielectric membrane. Inaccordance with the present application, the first capped nanowirestructure (20L and 24L) and the second capped nanowire structure 20R and24R) are separated by a nanogap 26 of less than 3 nanometers. A backsidecavity provided by opening 18 between semiconductor material portions10L,10R forms a suspended membrane making up the nanogap.

In the system 50, a top reservoir 54 is attached and sealed to the topof each anti-retraction capping material portion 24L, 24R, and a bottomreservoir 58 is attached and sealed to the bottom of each insulatingfilm portions 52L, 52R. The insulating film portions 52L, 52R includeone of the materials mentioned above for the hard mask. An electrode 56is present in the top reservoir 54, and another electrode 60 is presentin the bottom reservoir 58. Electrodes 56, 60 may be silver/silverchloride, or platinum for example. The reservoirs 54 and 58 are theinlet and outlet respectively for buffer solution 55, and reservoirs 54and 58 hold the DNA and/or RNA samples for sequencing. The buffersolution 55 is an electrically conductive solution (such as anelectrolyte) and may be a salt solution such as NaCl.

The system 50 shows a target molecule 62, which is the molecule beinganalyzed and/or sequenced. As an example DNA sample, the system 50 mayinclude a single stranded DNA molecule as target molecule 62, which ispassing through the nanogap and the dielectric membrane 12. The DNAmolecule has bases 64 (A, G, C, and T) represented as blocks. The DNAmolecule is pulled through the nanogap and dielectric membrane 12 by avertical electrical field generated by the voltage source 68. Whenvoltage is applied to electrodes 56 and 60 by the voltage source 68, thevoltage generates the electric field (between reservoirs 54 and 558)that controllably (e.g., by turning on and off the voltage source 68)drives the DNA molecule into and through the nanogap and dielectricmembrane 12. Also, the voltage of the voltage source 68 can produce thegate bias between metal pads 22L, 22R. Note that the metal pads 22L, 22Rand the nanowire portions 20L, 20R, and the nanogap may operate as atransistor. The voltage across the nanogap from the voltage source 68can be the gate for controlling the transistor. Metal pads (electrodes)22L, 22R are the drain and source respectively for the transistordevice. Voltage applied by voltage source 70 to metal pads 22L, 22R alsobuilds the electrical field, which can hold the base 64 in the nanogapfor sequencing. Note that metal pads 22L, 22R are electrically connectedto nanowire portions 22L and 22R having the nanogap 26.

Ammeter 66 monitors the ionic current change when DNA (or RNA) molecule(i.e., target molecule 62) goes through nanogap and the dielectricmembrane. The ionic current (measured by the ammeter 66) flows throughelectrode 56, into the buffer solution 56, through the nanogap and thedielectric membrane 12, out through the electrode 60. Voltage generatedby the voltage source 70 produces the voltage between the metal pads22L, 22R. Another ammeter 72 monitors the source-drain transistorcurrent from nanogap to detect nucleotide (i.e., base) information whenthe DNA/RNA molecule passes through the nanogap and dielectric membrane.For example, when a base 64 is in the nanogap and dielectric membrane 12and when voltage is applied by the voltage source 70, source-draintransistor current flows to metal pad 24R, into nanowire portion 20R,into the buffer solution 55 to interact with the base 530 positionedtherein, into nanowire portion 20L, out through the metal pad 24L, andto the ammeter 72. The ammeter 720 is configured to measure the changein source-drain current when each type of base 64 is present in thenanogap and also when no base 64 is present. The respective bases 64 ofthe target molecule 62 are determined by the amplitude of thesource-drain transistor current when each respective base in present inthe nanogap and dielectric membrane 12.

In the following example, a study was performed to show that a cappednanowire structure of the present application exhibited significantlyless retraction as compared to a nanowire structure in which theanti-retraction capped material was absent. Notably, a 5 nm thickaluminum oxide anti-retraction capping material was formed by atomiclayer deposition on exposed surfaces of a 35 nm-wide palladium nanowireand them TEM cutting was performed in accordance with an embodiment ofthe present application.

Another palladium nanowire was also cut using TEM however this palladiumnanowire did not include any anti-retraction layer thereon. The nanogapsizes of these two devices, i.e., capped nanowire and uncapped nanowire,were measured periodically over 48 hours.

The results are shown in FIG. 13. Notably, the results provided in FIG.13 show angstrom level change in the minimum dimension of the cappednanowire (i.e., at the resolution level of the TEM), while thenon-capped palladium nanowire shows a 0.8 nm increase in the nanogapover the same time period. This result demonstrates the usefulness ofproviding nanodevices which contain anti-retraction capped nanowires forcreating a fixed gap for recognition tunneling.

While the present application has been particularly shown and describedwith respect to various embodiments thereof, it will be understood bythose skilled in the art that the foregoing and other changes in formsand details may be made without departing from the spirit and scope ofthe present application. It is therefore intended that the presentapplication not be limited to the exact forms and details described andillustrated, but fall within the scope of the appended claims.

What is claimed is:
 1. A nanogap device comprising: a dielectricmembrane on a front-side surface of a semiconductor substrate; a firstcapped nanowire structure located on a first portion of said dielectricmembrane; and a second capped nanowire structure located on a secondportion of said dielectric membrane, wherein said first capped nanowirestructure and said second capped nanowire structure are separated by ananogap of less than 3 nanometers, the nanogap being formed through ananowire but not through the dielectric membrane; wherein said firstcapped nanowire structure includes a first nanowire portion, a firstmetal pad directly on top of said first nanowire portion, and a firstanti-retraction capping material portion directly on top of said firstmetal pad; wherein said second capped nanowire structure includes asecond nanowire portion, a second metal pad directly on top of saidsecond nanowire portion, and a second anti-retraction capping materialportion directly on top of said second metal pad; wherein said firstnanowire portion and said second nanowire portion comprise a same metal,said same metal selected from the group consisting of palladium andplatinum.
 2. The nanogap device of claim 1, wherein said semiconductorsubstrate includes an opening located at a back-side surface thereof,said opening exposes a surface of said dielectric membrane that isopposite a surface including said first capped nanowire structure andsaid second capped nanowire structure.
 3. The nanogap device of claim 2,wherein said opening is tapered and has a width that is greater thanthat of said nanogap.
 4. The nanogap device of claim 1, wherein saidfirst capped nanowire structure and said second capped nanowirestructure are positioned directly on top of one side of said dielectricmembrane in which an opposite side of said dielectric membrane ispositioned directly on top of said semiconductor substrate.
 5. Thenanogap device of claim 4, wherein said first anti-retraction cappingmaterial portion and said second anti-retraction capping materialportion comprise a same anti-retraction capping material.
 6. The nanogapdevice of claim 5, wherein said anti-retraction capping material isselected from the group consisting of aluminum oxide, titanium nitrideand silicon nitride.
 7. The nanogap device of claim 4, wherein anexposed edge of said first nanowire portion faces an exposed edge ofsaid second nanowire portion.
 8. The nanogap device of claim 7, whereina first linker molecule is located on said exposed edge of said firstnanowire portion and a second linker molecule is located on said exposededge of said second nanowire portion.
 9. The nanogap device of claim 1,wherein said semiconductor substrate comprises silicon.
 10. The nanogapdevice of claim 1, wherein the nanowire is a single nanowire having aheight of 2 nanometers.